This book focuses on the reliability and manufacturability of MEMS at a fundamental level. It demonstrates how to design MEMs for reliability and provides detailed information on the different types of failure modes and how to avoid them.

This book focuses on the reliability and manufacturability of MEMS at a fundamental level. It demonstrates how to design MEMs for reliability and provides detailed information on the different types of failure modes and how to avoid them.

This book focuses on the reliability and manufacturability of MEMS at a fundamental level. It demonstrates how to design MEMs for reliability and provides detailed information on the different types of failure modes and how to avoid them.