This book presents a broad overview of RF MEMS technology,  going from the MEMS devices (mainly BAW and Si MEMS resonators), to basic circuits such as oscillators and finally complete systems such as ultra low-power MEMS-based radios.

This book presents a broad overview of RF MEMS technology,  going from the MEMS devices (mainly BAW and Si MEMS resonators), to basic circuits such as oscillators and finally complete systems such as ultra low-power MEMS-based radios.

This book presents a broad overview of RF MEMS technology,  going from the MEMS devices (mainly BAW and Si MEMS resonators), to basic circuits such as oscillators and finally complete systems such as ultra low-power MEMS-based radios.