Laser micro machining as well as laser surface structuring are innovative manufacturing technologies with a wide range of machinable materials and a high level of flexibility. During the last years these technologies experience a strong increase in its industrial application due to these characteristics. With it new process requirements are demanded, as increasing process accuracy and smaller tolerances as well as the machining of novel materials. As a solution concept for the presented challenges an innovative inline metrology system has been developed within the project Scan4Surf, funded within the 7th framework program of the European Union.