This book presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. In also provides analysis and treatment for the most common static and dynamic phenomena in MEMS.

This book presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. In also provides analysis and treatment for the most common static and dynamic phenomena in MEMS.

This book presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. In also provides analysis and treatment for the most common static and dynamic phenomena in MEMS.