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An Introduction to Surface-Micromachining

Produktform: E-Buch Text Elektronisches Buch in proprietärem

provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining. weiterlesen

Elektronisches Format: PDF

Sprache(n): Englisch

ISBN: 978-1-4020-8021-0 / 978-1402080210 / 9781402080210

Verlag: Springer US

Erscheinungsdatum: 31.05.2004

Seiten: 189

Autor(en): Robert W. Johnstone, Ash Parmaswaran

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