Automation, Industry 4.0 and artificial intelligence are playing an increasingly central role for companies. Artificial intelligence in particular is currently enabling new methods to achieve a higher level of automation. However, machine learning methods are usually particularly lucrative when a lot of data can be easily collected and patterns can be learned with the help of this data. In the field of metrology, this can prove difi- cult depending on the area of work. Particularly for micrometer-scale measurements, measurement data often involves a lot of time, effort, patience, and money, so measurement data is not readily available. This raises the question of how meaningfully machine learning approaches can be applied to different domains of measurement tasks, especially in comparison to current solution approaches that use model-based methods. This thesis addresses this question by taking a closer look at two research areas in metrology, micro lead determination and reconstruction. Methods for micro lead determination are presented that determine texture and tool axis with high accuracy. The methods are based on signal processing, classical optimization and machine learning. In the second research area, reconstructions for cutting edges are considered in detail. The reconstruction methods here are based on the robust Gaussian filter and deep neural networks, more specifically autoencoders. All results on micro lead and reconstruction are compared and contrasted in this thesis, and the applicability of the dierent approaches is evaluated.weiterlesen