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Diffusion in Semiconductors

Produktform: Buch / Einband - fest (Hardcover)

Subvolume A of two subvolumes on consists of a comprehensive and critical compilation of data for the following materials and properties: diffusion in silicon, germanium and their alloys, diffusion in compound semiconductors, diffusion in silicides, chemical diffusion in bulk inhomogeneous semiconductors, grain-boundary and dislocation diffusion in semiconductors and silicides and surface diffusion on semiconductors. Although most of the silicides are not semiconducting, this chapter is included here because a number of them have become integrated in the Si technology and because they were not covered in the previous volume III/26 on diffusion in metallic substances. Subvolume A contains a CD-ROM.weiterlesen

Sprache(n): Englisch

ISBN: 978-3-540-60964-3 / 978-3540609643 / 9783540609643

Verlag: Springer Berlin

Erscheinungsdatum: 18.03.1998

Seiten: 476

Auflage: 1

Zielgruppe: Research

Beiträge von B.L. Sharma, C.E. Allen, D.L. Beke, C.M. Bruff, G. Erdelyi, G.E. Murch, E.G. Seebauer, H. Bracht, M.B. Dutt, P. Gas, F.M. d'Heurle, N.A. Stolwijk

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