In this work, the utilization of a variety of mechanical structures fort the sensing of physical properties of liquids, i.e. viscosity and mass density, was investigated and demonstrated both, theoretically and experimentally. These structures are set into resonance vibrations using electrical actuation mechanisms. The primary advancement is the application of low resonance frequencies compared to existing sensor concepts, where piezoelectric materials are commonly used. The former experimentally proven result, that cantilever structures vibrating in the kilohertz range yield viscosity measurements that are more comparable to laboratory methods than those obtained from well investigated quartz shear mode resonators is explained in the context of linear viscoelasticity and structural rheology. Significant relaxation processes in complex liquids result in the repeatedly observed deviation oft he viscosity values when measured in the megahertz range. The investigated sensor concepts utilize beam and diaphragm vibrations, as well as suspended plates and are therefore ideally suited for further miniaturization and mass production.weiterlesen