The angles between the axes of multi-axis coil and sensor systems are usually assumed to be orthogonal, hence the orthogonality errors of integrated sensors are ignored or neglected. Regarding magnetic position sensing, this leads to significant errors, which adversely affect the accuracy of the application. This work aims at developing methods for the calibration of orthogonality of both multi-axis coil and sensor systems, which allow a complete calculation of the measurement uncertainty and are thus suitable for the formulation of calibration guidelines. For this purpose, mathematical models are set up at first step, which allow the calculation of coil systems for the generation of homogeneous magnetic fields. By taking the winding into account in the calculation, this can be identified as a cause of orthogonality errors, which cause comparable deviations from the ideal magnetic field like manufacturing tolerances. It is shown that orthogonality errors affect both the homogeneity of the magnetic field and the angles between multi-axis coil systems. To determine the orthogonality of multi-axis coil systems, a method is developed at second step, which performs the calibration of the angles by rotating a magnetic field sensor. For the method, the calculation of the measurement uncertainty is shown and demonstrated using a 3-D Helmholtz coil. At third step, a consideration of the causes of orthogonality errors is performed for multi-axis integrated sensor systems, which are mainly due to manufacturing tolerances during fabrication and assembly. By measuring various commercially available 3-D magnetic field sensors, it can be shown that all measurement principles are affected by orthogonality errors, which manifest themselves as cross-sensitivities to the output value. Especially for integrated Hall-sensors it is investigated, which typical characteristics the cross-sensitivities show and how they can be reduced. For the calibration of the sensitivities and cross-sensitivities of multi-axis magnetic field sensors, a method is developed in the fourth and last step, which uses the previously calibrated 3-D coil system. This method not only allows easy and fast calibration, but also tolerates arbitrary positioning of the sensor in the homogeneous volume of the coil and arbitrary angles between the sensor axes. The calibration is demonstrated using an integrated 3-D Hall sensor, and the calculation of the measurement uncertainty is performed. By developing and performing the two calibration procedures, the goal of the thesis is achieved and a basis is established for converting them into calibration guidelines in the next step.weiterlesen