Metal-Dielectric Interfaces in Gigascale Electronics
Thermal and Electrical Stability
Produktform: E-Buch Text Elektronisches Buch in proprietärem
provides a unifying approach to the diverse and sometimes contradictory test results that are reported in the literature on metal-dielectric interfaces. The goal is to provide readers with a clear account of the relationship between interface science and its applications in interconnect structures. The material presented here will also be of interest to those engaged in field-effect transistor and memristor device research, as well as university researchers and industrial scientists working in the areas of electronic materials processing, semiconductor manufacturing, memory chips, and IC design.weiterlesen
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