Microsensors and MEMS (micro-electro-mechanical systems) arerevolutionising the semiconductor industry. A microsystem or theso-called "system-on-a-chip" combines microelectronic circuitrywith microsensors and microactuators. This emergent field has seenthe development of applications ranging from the electronic noseand intelligent ear to micro-tweezers and the modern ink-jetnozzle. Providing a complete overview of microsensor technologies, thisunique reference addresses vital integration issues for thesuccessful application of microsensors, MEMS and smartdevices. Features include: * Review of traditional and emerging fabrication processesincluding bulk and silicon micromachining, microstereolithographyand polymer processing methods. * Focus on the use of IDT (interdigital transducer) microsensors inthe development of low energy budget, wireless MEMS ormicromachines. * Coverage of the katest applications in smart devices includingthe electronic nose, tongue and finger, along with smart sensorsand strcutures such as smart skin. * An overview of the development of intelligent sensing devicesthrough the use of sensor arrays, parametric compensation of sensorsugnals and ASIC technology. * Comprehensive appendices outlining vital MEMS materialproperties, relevant web sites and a guide to key institutionsactive in the field. Microsensors, MEMS and Smart Devices presents readers with themeans to understand and evaluate microsystems. Advanced studentsand researchers in microelectronics, engineers and developers ofmicrosensor systems will find this comprehensive treatmentessential reading. Detailed coverage of material properties makesthis an important reference work for mechnical engineers,physicists and material scientists working in the field.weiterlesen