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Nanopositioning Technologies

Fundamentals and Applications

Produktform: Buch / Einband - flex.(Paperback)

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.weiterlesen

Sprache(n): Englisch

ISBN: 978-3-319-79539-3 / 978-3319795393 / 9783319795393

Verlag: Springer International Publishing

Erscheinungsdatum: 30.03.2018

Seiten: 409

Auflage: 1

Herausgegeben von Yu Sun, Xinyu Liu, Changhai Ru

106,99 € inkl. MwSt.
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