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Plasma Processing of Semiconductors

Produktform: E-Buch Text Elektronisches Buch in proprietärem

contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge. weiterlesen

Elektronisches Format: PDF

Sprache(n): Englisch

ISBN: 978- / 978-9401158848 / 9789401158848

Verlag: Springer Netherland

Erscheinungsdatum: 11.11.2013

Seiten: 613

Herausgegeben von Paul Williams, P.F. Williams

309,23 € inkl. MwSt.
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