The goal of this work is to contribute towards understanding the synthesisstructure-elastic property relationship of M2AlC (M = Ti, V, Cr) thin films. Ti2AlC thin films have been synthesized in this work at 850°C. The film contains TiCx as a second phase as well as pores. Similar to previously reported works, the result obtained in this work suggest that TiCx is essential for nucleation of Ti2AlC. A feasible explanation for the porosity is shadowing due to low adatom mobility. The measured Young’s modulus is 266 ± 106 GPa and the corresponding bulk modulus approximated as isotropic is 145 ± 58 GPa. The average values are within the expected deviation consistent with the previously reported theoretical and experimental values with approximately 15% and 20% differences, respectively. The large standard deviation is probably due to surface roughness.weiterlesen