This book provides a new algebraic model for the electrical behavior of the RF modulated plasma boundary sheath. It corrects the three fundamental weaknesses of the well-known Lieberman models twenty-five years ago, namely that they are limited to the case of a single driving frequency, to the regime of large applied voltages, and to the two limiting cases of either highly collisional or completely collision-free motion. The provided algebraic model captures the plasma sheath behavior in a wide range of frequencies, waveforms, amplitudes, and collisionality. The thesis covers the most fundamental principles and the important models of the plasma boundary sheath in a comprehensive way. Born in 1975 in Damatta (Egypt), Abd Elfattah Elgendy got his Bachelor of Physics in 1998 and his Master degreee in Theoretical Plasma Studies in 2004 from Ain Shams University Cairo. In 2008-2010 he got a scholarship for the Ruhr-Universität Bochum (Germany), where he modeled a plasma boundary sheath analytically and numerically. In 2013 he graduated with the thesis "Plasma Boundary Sheath as a Nonlinear Element".weiterlesen